Features and Benefits

In-line, real-time monitoring and characterization of chemical composition of liquids No need for chemical sampling or dilution Short measurement time and low operational costs One analyzer can monitor several measuring cells with different chemistries Analysis of complex (multi-component) chemistries Real-time measurement enables closed loop control Up to 200 meters distance between analyzer and measuring cell enables placement of analyzer in a convenient location
With the capability to monitor up to eight flow cells in parallel, the WetSpec200 provides an efficient, low cost per channel process monitoring. When integrated into a control system, the WetSpec200 enables tighter process control and identifies process excursions before they affect yield.

适用于半导体湿制程(Wet Bench)即时监测(In-line monitoring)，可随时掌握化学液状况,如清洗(Clean),蚀刻(Etch),去光阻(Strip)等Processes，如半导体的SC1、SC2、BOE、DHF、EKC、ACT等; TFT-LCD的Al etch、BOE、PR STRIPPER等;与太阳能的HF/HNO3、KOH/IPA等.提供您对化学液用量、制程效率、制程问题改善、化学液寿命延长控制、研发帮助，同时能侦测8种不同成分的化学槽