科宇系统有限公司

NTM eTa - In-Situ Wafer Temperature Monitor

Thu, 28 Jul 2016 15:52:33 +0800

利用红外光感测温度的方式，即时并且在原点位上测量晶圆 (Wafer) 表面温度 (Temperature) ，耗能低、更新速率快 (up to 3000Hz)，并且采用可拆卸式的光纤。此外，机台针对波长的精确性、更新的速率和背景过滤都有补偿的功能。

4D Mercury CV Application Chart

Tue, 08 Sep 2009 18:50:10 +0800

Mercury Probe C-V map Systems:Measurement techniques Capacitance-Voltage (CV):Cd (square wave deep pulse)Cq (square wave quasi static)Ch (square wave high frequency)Sinusoidal Ch (Agilent 4192A, 4285 A, Keithley 590) Current VoltageCurrent range 10fA to 1mA, Voltage range up to +/-100VExtended Voltage range +/- 1000V (Keithley 2410, 237)Constant currentConstant voltageMulti-terminal IV curves (pseudo MOST technique) Silicon Oxide And Gate Material, Characterization And Integrity Monitoring:Cox (Oxide capacitance)tox (Oxide thickness)K value (dielectric constant)K-f (frequency dependent dielectric constant)teq (equivalent oxide thickness)Vfb (flat band voltage)Dit (Interface trap density)(Sheet) Resistance and Resistivity measurement of SiO2 and semi-insulating materialsTDDB (Time dependent dielectric breakdown) tests:tbd (time to breakdown)Qbd (Charge to Breakdown)Vbd (ramp breakdown Voltage)Defect density (Density of defect causing early breakdown, e.g. Pinhole density)Cumulative Compound SemiconductorsN(W) Carrier density profilingResistivity of semi-insulating substrates or layersPinch-off Voltage High Resistivity MaterialsI-V (Current vs. Voltage)(Sheet) Resistance and Resistivity measurement Ferroelectric materialsK-E (dielectric vs. electric field)P-E (polarization vs. electric field)K-f (dielectric vs. frequency) with Model 192 probe stationK-T (dielectric vs. temperature) with temperature chamber for Tc (Curie temperature)Hysteresis loop

4D 4PP RS Meter

Wed, 30 Jun 2010 13:05:55 +0800

欢迎洽询相关机型及规格!FOUR DIMENSIONS INC. is located in California and has manufactured advanced semiconductor probing systems since 1978. We provide Four-Point Probes with an extended measurement range for sophisticated probing of compound semiconductor wafers. 280PI/280SI 4PP Station for 200mm or 156mm x 156mm FeaturesSemi-Auto Sheet Resistivity MeterMeasurement Range 1m W/sq to 800K W/sqextended range up to 8E11 W/sqtemperature compensation optionup to to 8" wafer capability or 156mm x 156mmstand alone systems and PC controlled systems with Automap software packageModel 233AC/ 233AS / 333AC / 333AF 4PP Station for 200mm/300mm Features:Fully Automated Cassette to Cassette System with SMIF/FOUP optionSheet Resistance Measurement Range 1m W/sq to 800K W/sqextended range up to 8E11 W/squp to to 8"/12" wafer capabilityAutomap software packageSECS-II communication availableAutomatic probe-head switching available

Wet Series - Wet Chemistry Process monitoring systems

Thu, 28 Jul 2016 13:53:03 +0800

Wet series enable stringent and instant process control which identifies excursions before affecting yields.*Montoring in-line and on-time*No sampling or dilution required*Operating in low costs*Enable closed loop control*Temperature compensation *Self-calibration 可测量的液体种类繁多，请来信或来电询问。

PSI 442-PMI ™ MANUAL PHOTOMASK INSPECTION

Wed, 30 Jun 2010 13:10:17 +0800

PSI462PMI手动光罩检验机适用4~9寸光罩检查，搭配USMCO专用400X光学显微镜迅速检测各种光罩缺陷，并可加装CCD摄影机与高解析度显示萤幕，是最经济超值的光罩检验机。

PSI 400/ 410 Quick Position Manual Probe Station

Thu, 23 Dec 2010 11:52:01 +0800

PSI 400/ 410 Quick Position Manual Wafer Probe Station 量测6”~8”晶圆，高精确度，推拉式容易操作，可使用单手操作定位。PSI 400平台Z轴具有3个定位点， PSI 410 显微镜Z轴具有12个定位点。

NTM DeLTA - In-Situ Wafer Temperature Monitor

Thu, 28 Jul 2016 15:51:54 +0800

利用红外光感测温度的方式，即时并且在原点位上同时测量晶圆 (Wafer) 表面温度 (Temperature) 和辐射的反射率 (Emissivity reflectivity)，耗能低、更新速率快 (up to 3000Hz)，并且采用可拆卸式的光纤。此外，机台针对波长的精确性、更新的速率和背景过滤都有补偿的功能。

CVmap 92A/B

Tue, 08 Sep 2009 18:50:55 +0800

Mercury Probe Systems CVMAP 92 A/B Desktop system Unique Mercury probe: Dot area 5E-5 to 0.6 cm2Contact area repeatability better 2%Contact configurations: Dot, Dot / Ring, Dot / 2 RingsRefreshed mercury before each contact insures clean contactProbe head easy to changeIntegrated light source for illumination of measured sample (probe head dependent)Minimal probe head to wafer contact areaNon scratching poly-carbonate probe head materialCapacitance test: Quasistatic method with square wave signals (internal)High frequency method with square wave signals (internal)Deep pulsed method with square wave signals (internal)Test frequency up to 10kHz (Bandwidth 1 MHz)External C-V meters (Bandwidth:1MHz standard, up to 10MHz optional)Capacitance measurement range: 0 to 20 nFStray capacitance < 1.5pF (desktop systems)Equivalent oxide thickness by C-V: 1 nm to 2000 nm, repeatability

WetCon - Conductive Concentration Analyser

Thu, 28 Jul 2016 10:51:34 +0800

用导电度测量可导电的化学溶液（单一成份Single Component）浓度，有自动校正和温度补偿的功能，可测量DHF、HCl、HNO3、H2SO4、NH3、TMAH、Citric Acid……等液体。

PSI 462-PMI™ PHOTOMASK INSPECTION

Tue, 08 Sep 2009 18:56:45 +0800

PSI462PMI手动光罩检验机适用4~9寸光罩检查，搭配USMCO专用400X光学显微镜迅速检测各种光罩缺陷，并可加装CCD摄影机与高解析度显示萤幕。 PSI 462 PMI手动光罩检验机提供DRO (Digital Readout)数位座标判读系统，可重复进行缺陷定位与检验，是量测与故障分析的最佳利器。

PSI 2020HV™ 电路板讯号完整性测试探针台

Wed, 30 Dec 2009 14:39:30 +0800

PSI 2020HV™ HORIZONTAL/VIRTICAL SIGNAL INTEGRITY TDR PROBE STATION MULTIPLE CIRCUIT BOARD CONFIGURATIONS 适用高速印刷电路板进行电性量测或时域测试(Time Domain Testing)。量测平台可调整为水平或垂直位置，可搭配两具摄影机。显微镜放大倍率为2.1X to 270X。 PSI 2020HV可与Tektronix 11800、SDZOTDR、TDS 8000、80E04TD及Agilent 54750 or 83480相容。如需其他规格请联络本公司

Jandel - Four-Point-Probe Heads

Tue, 02 Aug 2016 09:23:16 +0800

Jandel Engineering Ltd. 成立於1967年(具备超过50年以上的专业经验), 是英国专门制造四点探针头的厂商，各大厂牌阻值量测系统，例如: KLA-Tencor/Prometrix、CDE ResMap、4D、Napson等，已广泛使用於国内代工、记忆体、封测及面板厂等客户，依据量测需求有多种规格可以选择，欢迎洽询。Cartridge probe with 6-way connector (KLA/Tencor)Cartridge probe with 6-way connector (CDE) Cylindrical four point probe head

Manipulators探针座

Fri, 27 Dec 2024 11:19:10 +0800

PRODUCT NAME: P210/360VM, LEFT HAND For probing 10 micron geometries, 0.4” (10.0mm) maximum travel per axis, 32 TPI lead screw, mini-arc manipulator, standard vacuum base for use with PSI 400 and 410 stations. If you can not find what you need, Please contact us for more information.

CVmap 3093AC/BC

Tue, 08 Sep 2009 18:50:35 +0800

CVmap 3093 AC/BC Features: Cassette to cassette version of CVmap 3093 A/B150mm, 200 mm, and 300 mm (6", 8", and 12") capabilitySafety first design principleUnique Mercury probe: Dot area 5E-5 to 0.6 cm2Contact area repeatability better 2%Contact configurations: Dot, Dot / Ring, Dot / 2 RingsRefreshed mercury before each contact insures clean contactProbe head easy to changeIntegrated light source for illumination of measured sample (probe head dependent)Minimal probe head to wafer contact areaNon scratching poly-carbonate probe head material Capacitance test: Quasistatic method with square wave signals (internal)High frequency method with square wave signals (internal)Deep pulsed method with square wave signals (internal)Test frequency up to 10kHz (Bandwidth 1 MHz)External C-V meters (Bandwidth:1MHz standard, up to 10MHz optional)Capacitance measurement range: 0 to 20 nFStray capacitance < 1.5pF (desktop systems)Equivalent oxide thickness by C-V: 1 nm to 2000 nm, repeatability

WetRad - Mixing Component Concentration Analyser

Thu, 28 Jul 2016 17:39:34 +0800

从UV/VIS/NIR里选定两个波长，测量混合液（mixing chemicals）的其中一个成份（One chose Component），可测量0˚C到120˚C的化学溶液，采用光学式测量，快速、连续且准确的判读欲知成分浓度，WetRad里有两颗LED灯泡可以互相校正光源，可量测H2O in IPA、H2O in solvent、TMAH、H2O2等等。

Photomask Visual Inspection/Review Station

Tue, 08 Sep 2009 18:56:23 +0800

Photomask Visual Inspection/Review Station PSI生产之光罩检验机提供客户最完善且更具经济效益的解决方案，让客户能侦测、检验各种先进光罩上的缺陷，改进生产与品管的效率。具备精确定位能力与先进光学照明，透过四种独立光源 Incident Bright-Field(IBF) 、 Incident Dark-Field(IDF) 、 Transmitted Bright-Field(TBF)、 Transmitted Dark-Field(TDF)组成八种照明模式，能准确检测包括particles、pinhole、chrome defect、edge effect、scratching thin metal and contamination等各种光罩的缺陷位置，大幅提高光罩检验效率与正确性。PSI 400 系列适用於 4"~9" 光罩；PSI 300 系列适用於 4"~7" 光罩；342-PMI 为通用手动光罩检验机；362-PMI 提供DRO( Digital Readout)数位座标判读系统；

Micro Point Pro (MPP) - Four-Point-Probe Heads

Fri, 27 Dec 2024 09:38:32 +0800

Micro Point Pro (MPP)成立於 2010 年，收购了 Kulick & Sofa 四点探针头及后端工具生产线，同时一并吸收了该生产线拥有超过 40 年专业知识和经验丰富的员工。4PP探头全在以色列制造、组装、并通过内部严谨的品质检验。其4PP探头OEM客户有：KLA-Tencor、Napson 、Kokusai, etc，尚有各式四点探针针头可供选购或客制。MPP is a world renowned, leading manufacturer of Four Point Probe (4PP) heads for resistivity measurements of wafers and thin conductive films.MPP’s 4PP are commonly used in applications such as:▪ Resistivity measurement of silicon wafers▪ 4-point measurement of epitaxial, ion-implanted and defused layers▪ 4-point measurement of metallic and other thin films MPP’s Probe Head Features and Advantages: ▪ Tungsten Carbide needles with low friction Ruby guides ▪ A wide range of probe tip radii and needle spacings ▪ Individual needle pressure adjustment ▪ Variety of probe head designs : Fell, Cylindrical, others.. ▪ Option for customization ▪ Refurbishment program availableMPP’s probe heads are being used across the globe on the most well-known wafer resistivity measuring equipment such as KLA, Kokusai, Napson and other systems.

WetSpec 201/200 - Mixing Chemical Concentration Analyser

Thu, 28 Jul 2016 14:37:47 +0800

以近红外线技术量测Mixing Chemical里面所有成分的个别浓度值，可测量0˚C到120˚C的化学溶液。WetSpec201用来测量单个化学槽，WetSpec200则可以外接八个化学槽，依化学槽的顺序测量不同化学溶液。WetSpec可以测量的化学液体种类十分多，例如SC1、SC2、SPM、DSP、BOE、solvent、HF/HCl、Al etching、IPA/KOH等等液体，欢迎来信或来电洽询。

Probe tips探针

Tue, 08 Sep 2009 18:59:12 +0800

Straight TipsCat whisker TipsBend Tips Double bend TipsSpring probe TipsRF/Microwave Tips Tungsten Tip sizes between 0.1um to 10um.Plated Gold or special metals Special materials (beryllium cooper, nickel, etc.) available.