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四點探針量測系統3

四點探針阻值量測儀

科宇系統提供四點探針量測相關設備與探頭耗材


Features:

  • Automated Sheet Resistivity Meter
  • 1 mOhm / square to 800 kOhm / square
  • extended range up to 8x1011W/sq
  • temperature compensation option
  • up to to 8" wafer capability or 156mm x 156mm
  • stand alone systems and PC controlled systems with Automap software package
Model 333A Four-Point Probe for 300mm Features:
  • Automated Sheet Resistivity Meter
  • 1 mOhm / square to 800 kOhm / square
  • extended range up to 8x1011W/sq
  • up to to 12" wafer capability
  • Automap software package
  • SECS-II communication available
  • Automatic probe-head switching available