科宇系統有限公司

PSI 442-PMI ™ MANUAL PHOTOMASK INSPECTION售價: (Call)

Wed, 30 Jun 2010 13:10:17 +0800

PSI462PMI手動光罩檢驗機適用4~9吋光罩檢查，搭配USMCO專用400X光學顯微鏡迅速檢測各種光罩缺陷，並可加裝CCD攝影機與高解析度顯示螢幕，是最經濟超值的光罩檢驗機。

PSI 600LS Manual 300mm WAT Probe Station售價: (Call)

Thu, 23 Dec 2010 11:52:05 +0800

PSI 600LS Manual 300mm Wafer Probe Station 適用12 吋之晶圓WAT 應用，具有低漏電流(fA)及高精密度( 0.1μm)。量測搭配精密馬達驅動X-Y Stage解析度為 0.1um。可搭配溫度控制、或特殊Wager Chuck。顯微鏡使用精密光學顯微鏡，同時具有延長顯微鏡壽命設計。

WetSpec - Wet Chemistry Process monitoring system 售價: (Call)

Wed, 03 Mar 2010 10:50:30 +0800

Features and Benefits

In-line, real-time monitoring and characterization of chemical composition of liquids No need for chemical sampling or dilution Short measurement time and low operational costs One analyzer can monitor several measuring cells with different chemistries Analysis of complex (multi-component) chemistries Real-time measurement enables closed loop control Up to 200 meters distance between analyzer and measuring cell enables placement of analyzer in a convenient location
With the capability to monitor up to eight flow cells in parallel, the WetSpec200 provides an efficient, low cost per channel process monitoring. When integrated into a control system, the WetSpec200 enables tighter process control and identifies process excursions before they affect yield.

適用於半導體濕製程(Wet Bench)即時監測(In-line monitoring)，可隨時掌握化學液狀況,如清洗(Clean),蝕刻(Etch),去光阻(Strip)等Processes，如半導體的SC1、SC2、BOE、DHF、EKC、ACT等; TFT-LCD的Al etch、BOE、PR STRIPPER等;與太陽能的HF/HNO3、KOH/IPA等.提供您對化學液用量、製程效率、製程問題改善、化學液壽命延長控制、研發幫助，同時能偵測8種不同成分的化學槽

PSI 1920H™ HORIZONTAL SIGNAL INTEGRITY TDR PROBE S售價: (Call)

Thu, 23 Dec 2010 11:51:57 +0800

PSI 1920H™ HORIZONTAL SIGNAL INTEGRITY TDR PROBE STATION MULTIPLE CIRCUIT BOARD CONFIGURATIONS 適用平面顯示器(flat panel displays)或高密度印刷電路板(high density populated PCB)進行電性量測或時域測試(Time Domain Testing)。
顯微鏡放大倍率為2.1X to 270X。
可搭配使用PICO或TDR Probe進行高頻量測。

Jandel Probe heads售價: (Call)

Thu, 23 Dec 2010 11:50:23 +0800

Jandel Cartridge Probe Heads for CDE ResMap system or other 4PP systems auch as 4 Dimensions, KLA-Tencor/Prometrix, and so on.

供應Jandel 探頭,適合4D, KLA, CDE等量測設備有多種規格請洽本公司

Mercury Probe CVmap Applications售價: (Call)

Tue, 08 Sep 2009 18:50:10 +0800

Mercury Probe CVmap Applications:

Capacitance-Voltage (CV):

Cd (square wave deep pulse)
Cq (square wave quasi static)
Ch (square wave high frequency)
Sinusoidal Ch (Agilent 4192A, 4285 A, Keithley 590)

Current Voltage (IV):

Current range 10fA to 1mA, Voltage range up to +/-100V
extended Voltage range +/- 1000V (Keithley 2410, 237)
Constant current
Constant voltage
Multi terminal IV curves (pseudo MOST technique)

Silicon: Oxide and gate material (low k, high k) characterization and integrity monitoring

Cox (Oxide capacitance)
tox (Oxide thickness)
K value (dielectric constant)
K-f (frequency dependent dielectric constant)
teq (equivalent oxide thickness)
Vfb (flat band voltage)
Dit (Interface trap density)
(Sheet) Resistance and Resistivity measurement of SiO2 and semi-insulating materials
TDDB (Time dependent dielectric breakdown) tests:
- tbd (time to breakdown)
- Qbd (Charge to Breakdown)
- Vbd (ramp breakdown Voltage)
- Defect density (Density of defect causing early breakdown, e.g. Pinhole density)
- Cumulative failure analysis
- Furnace Contamination monitoring
Mobile ion concentration with hot chuck
Current-Voltage (IV):
- leakage current mapping
- ultra thin oxide thickness mapping
Stress testing (CV, V stress, CV)

Doping and low dose ion implantation monitoring:

N(W) (doping density profiling of raw wafer and epitaxial layers)
PØ (partial dose)
I (Ion implantation density)

Determining carrier generation lifetime

C-I (Capacitance vs. Current)
tg (Carrier generation lifetime)

SOI characterization (B systems)

Pseudo MOST technique
- Id-Vg (Drain current vs. Gate Voltage ) at varying Vd (Drain Voltage)
- gm-V (transconductance vs. Voltage)
- Electron and hole mobility
- Ø Mobility degradation factor
Buried oxide characterization
- Leakage mapping
- C-Vg (Capacitance-gate Voltage) for Dit (Interface trap density)

Compound Semiconductors

N(W) Carrier density profiling
Resistivity of semi-insulating substrates or layers
Pinch-off Voltage

High Resistivity Materials (Undoped Poly-Silicon, Carbon film)

I-V (Current vs. Voltage)
(Sheet) Resistance and Resistivity measurement

Ferroelectric materials

K-E (dielectric vs. electric field)
P-E (polarization vs. electric field)
K-f (dielectric vs. frequency) with Model 192 probe station
K-T (dielectric vs. temperature) with temperature chamber for Tc (Curie temperature)
Hysteresis loop

ADE 9600 9500 9700 Used System售價: (Call)

Thu, 23 Dec 2010 11:52:46 +0800

ADE 中古機台

PSI S500 SEMI-AUTOMATIC PROBE STATION售價: (Call)

Thu, 23 Dec 2010 11:52:03 +0800

PSI S500 SEMI-AUTOMATIC PROBE STATION 操作容易的半自動探針台，可同時放置10組以上探針座進行量測使用Pendant (keypad)或Joystick操作，可透過RS232介面傳輸指令。採用固定量測平面設計，顯微鏡在水平X與Y軸方向各可移動2”。顯微鏡使用USMCO精密光學顯微鏡。可配合National Instruments的Labview™軟體或Alliance Technology的Metrics ICS™進行量測。

PSI 462-PMI™ PHOTOMASK INSPECTION售價: (Call)

Tue, 08 Sep 2009 18:56:45 +0800

PSI462PMI手動光罩檢驗機適用4~9吋光罩檢查，搭配USMCO專用400X光學顯微鏡迅速檢測各種光罩缺陷，並可加裝CCD攝影機與高解析度顯示螢幕。 PSI 462 PMI手動光罩檢驗機提供DRO (Digital Readout)數位座標判讀系統，可重複進行缺陷定位與檢驗，是量測與故障分析的最佳利器。

Probe head for 4 ponit probe售價: (Call)

Wed, 30 Jun 2010 12:58:03 +0800

Jandel原廠四點探針頭 4 point probe heads,適用各大廠牌阻值量測系統,依據量測需求有多種規格 Type A,Type B,Type C,Type D 歡迎與我們連絡

Miniature Cartridge (Napson)

With top retaining screw and positioning key. Plastic housing. Miniature Cartridge (AIT)

With 6-32 screw holes. Plastic housing. Cylindrical

25.4mm diameter x 48.5mm high. Cartridge with 6-way Connector Socket (KLA Prometrix)

25.4mm diameter x 41mm high. Cartridge with 6-way Connector Socket (CDE ResMap)

With black nosepiece and 1.5mm needle projection. Macor Glass-Ceramic High/Low Temperature

With ceramic fibre leads. Cartridge with lead

25.4mm diameter x 40.5mm high. Cartridge with 4 Pin Connector

25.4 diameter 40.5mm high. Cylinidrical Hall / Resistivity

25.4mm diameter x 18.5mm high.

CVmap 3093AC/BC售價: (Call)

Tue, 08 Sep 2009 18:50:35 +0800

CVmap 3093 AC/BC Features:

Cassette to cassette version of CVmap 3093 A/B
150mm, 200 mm, and 300 mm (6", 8", and 12") capability
Safety first design principle
Unique Mercury probe:
- Dot area 5E-5 to 0.6 cm2
- Contact area repeatability better 2%
- Contact configurations: Dot, Dot / Ring, Dot / 2 Rings
- Refreshed mercury before each contact insures clean contact
- Probe head easy to change
- Integrated light source for illumination of measured sample (probe head dependent)
- Minimal probe head to wafer contact area
- Non scratching poly-carbonate probe head material
Capacitance test:
- Quasistatic method with square wave signals (internal)
- High frequency method with square wave signals (internal)
- Deep pulsed method with square wave signals (internal)
- Test frequency up to 10kHz (Bandwidth 1 MHz)
- External C-V meters (Bandwidth:1MHz standard, up to 10MHz optional)
- Capacitance measurement range: 0 to 20 nF
- Stray capacitance < 1.5pF (desktop systems)
- Equivalent oxide thickness by C-V: 1 nm to 2000 nm, repeatability <±1%
- Bias voltage +/- 100 V
Current / Voltage test:
- Bias voltage +/- 100 V (with external source up to +/- 1000V, optional)
- Current range: 10fA to 1mA with freely selectable threshold
- Oxide thickness by I-V method 1.5 nm to 3nm
Edge exclusion down to 2mm (probe head dependent)
Versatility:
- Connections for external 2 and 4 terminal meters
- Connections for attaching external probe stage
Internal automatic calibration
Norms and standards:
- SEMI S2-0200 standard compliant (92A/B)
- CE mark (European models only)
- EN55024:1998
- FCC Part 15 Class A

PSI 400/ 410 Quick Position Manual Probe Station售價: (Call)

Thu, 23 Dec 2010 11:52:01 +0800

PSI 400/ 410 Quick Position Manual Wafer Probe Station 量測6”~8”晶圓，高精確度，推拉式容易操作，可使用單手操作定位。PSI 400平台Z軸具有3個定位點， PSI 410 顯微鏡Z軸具有12個定位點。

Photomask Visual Inspection/Review Station售價: (Call)

Tue, 08 Sep 2009 18:56:23 +0800

Photomask Visual Inspection/Review Station PSI生產之光罩檢驗機提供客戶最完善且更具經濟效益的解決方案，讓客戶能偵測、檢驗各種先進光罩上的缺陷，改進生產與品管的效率。
具備精確定位能力與先進光學照明，透過四種獨立光源 Incident Bright-Field(IBF) 、 Incident Dark-Field(IDF) 、 Transmitted Bright-Field(TBF)、 Transmitted Dark-Field(TDF)組成八種照明模式，能準確檢測包括particles、pinhole、chrome defect、edge effect、scratching thin metal and contamination等各種光罩的缺陷位置，大幅提高光罩檢驗效率與正確性。
PSI 400 系列適用於 4"~9" 光罩；
PSI 300 系列適用於 4"~7" 光罩；
342-PMI 為通用手動光罩檢驗機；
362-PMI 提供DRO( Digital Readout)數位座標判讀系統；

四點探針阻值量測儀售價: (Call)

Wed, 30 Jun 2010 13:05:55 +0800

科宇系統提供四點探針量測相關設備與探頭耗材

Features:

Automated Sheet Resistivity Meter
1 mOhm / square to 800 kOhm / square
extended range up to 8x1011W/sq
temperature compensation option
up to to 8" wafer capability or 156mm x 156mm
stand alone systems and PC controlled systems with Automap software package

Model 333A Four-Point Probe for 300mm Features:

Automated Sheet Resistivity Meter
1 mOhm / square to 800 kOhm / square
extended range up to 8x1011W/sq
up to to 12" wafer capability
Automap software packag e
SECS-II communication available
Automatic probe-head switching available

CV Map 92售價: (Call)

Tue, 08 Sep 2009 18:50:55 +0800

Mercury Probe Systems CVMAP 92 A/B

Desktop system
Unique Mercury probe:
- Dot area 5E-5 to 0.6 cm2
- Contact area repeatability better 2%
- Contact configurations: Dot, Dot / Ring, Dot / 2 Rings
- Refreshed mercury before each contact insures clean contact
- Probe head easy to change
- Integrated light source for illumination of measured sample (probe head dependent)
- Minimal probe head to wafer contact area
- Non scratching poly-carbonate probe head material
Capacitance test:
- Quasistatic method with square wave signals (internal)
- High frequency method with square wave signals (internal)
- Deep pulsed method with square wave signals (internal)
- Test frequency up to 10kHz (Bandwidth 1 MHz)
- External C-V meters (Bandwidth:1MHz standard, up to 10MHz optional)
- Capacitance measurement range: 0 to 20 nF
- Stray capacitance < 1.5pF (desktop systems)
- Equivalent oxide thickness by C-V: 1 nm to 2000 nm, repeatability <±1%
- Bias voltage +/- 100 V
Current / Voltage test:
- Bias voltage +/- 100 V (with external source up to +/- 1000V, optional)
- Current range: 10fA to 1mA with freely selectable threshold
- Oxide thickness by I-V method 1.5 nm to 3nm
Edge exclusion down to 2mm (probe head dependent)
Versatility:
- Connections for external 2 and 4 terminal meters
- Connections for attaching external probe stage
Internal automatic calibration
Norms and standards:
- SEMI S2-0200 standard compliant (92A/B)
- CE mark (European models only)
- EN55024:1998
- FCC Part 15 Class A
Up to 200 mm (8") capability
Drawer for receiving the wafer
CVmap software
Safety first design principle

PSI 404LS / 414LS售價: (Call)

Thu, 23 Dec 2010 11:51:59 +0800

PSI 404LS / 414LS 4” x 4” X-Y Focus Precision Lead Screw Probe Station 量測6”~8”晶圓，高精確度採用固定量測平面設計，顯微鏡在水平X與Y軸方向各可移動4”，晶圓承載平台位置可移動6”~8”，可用雙手同時調整，容易精確定位。PSI 404平台Z軸具有3個定位點， PSI 414 顯微鏡Z軸具有12個定位點。提供範圍廣泛的各種測試應用且同時提供功能強大, 品質穩定的優勢。

P2525M MANIPULATORS售價: (Call)

Thu, 23 Dec 2010 11:51:54 +0800

PRODUCT NAME: P2525M-VM For probing sub-micron geometries, 0.5” (12.7mm) travel per axis, 200 TPI, standard base for use with PSI 400 and 410 stations, either left or right side of station, features fast Z lift. Vacuum.

PSI 400LS / 410LS Precision Lead Screw Positioning售價: (Call)

Tue, 08 Sep 2009 18:57:46 +0800

PSI 400LS / 410LS Precision Lead Screw Positioning Probe Station 量測6”~8”晶圓，高精確度，推拉式容易操作，可使用單手操作定位。PSI 400LS平台Z軸具有3個定位點， PSI 410 LS顯微鏡Z軸具有12個定位點。

PSI 2020HV™ 電路板訊號完整性測試探針台售價: (Call)

Wed, 30 Dec 2009 14:39:30 +0800

PSI 2020HV™ HORIZONTAL/VIRTICAL SIGNAL INTEGRITY TDR PROBE STATION MULTIPLE CIRCUIT BOARD CONFIGURATIONS 適用高速印刷電路板進行電性量測或時域測試(Time Domain Testing)。量測平台可調整為水平或垂直位置，可搭配兩具攝影機。顯微鏡放大倍率為2.1X to 270X。 PSI 2020HV可與Tektronix 11800、SDZOTDR、TDS 8000、80E04TD及Agilent 54750 or 83480相容。如需其他規格請聯絡本公司

BGA PCB 探針台售價: (Call)

Wed, 30 Dec 2009 14:39:12 +0800

PSI 1120™ BGA COMPACT GENERAL PURPOSE PROBE STATION 運用於適用BGA、平面顯示器(flat panel displays)或高密度印刷電路板(high density populated PCB)電性或信號完整性(Signal Integrity) 量測，適用於各種高速資料傳輸電路設計測試應用。

Probe tips探針售價: (Call)

Tue, 08 Sep 2009 18:59:12 +0800

Straight Tips
Cat whisker Tips
Bend Tips
Double bend Tips
Spring probe Tips
RF/Microwave Tips
Tungsten Tip sizes between 0.1um to 10um.
Plated Gold or special metals Special materials (beryllium cooper, nickel, etc.) available.

Probe Holders售價: (Call)

Tue, 08 Sep 2009 19:00:38 +0800

These general-purpose probe holders offer three versions with two different holder tube configurations.

Bent tube at 45 degree angle with either a 45 degree probe tip exit secured by a setscrew or probe tip exit at end (on axis) secured by a set screw on the side.

The third is a straight tube with a probe tip exit at end (on axis) secured with a setscrew on the side.

Specification:
· Tube and tip assembly, 300 series stainless steel
· 22ga. silver plated stranded copper wire with black PTFE insulation
· Standard tested assembly resistance > 0.2 ohms @ 70 degree F
· Temperature range of probing to 400 degree C · BNC connector, 2 lug male, 50 ohm
· Accepts Model 7 replaceable probe tips, see probe guide for more information

Manipulators探針座售價: (Call)

Wed, 30 Dec 2009 14:39:56 +0800

PRODUCT NAME: P210/360VM, LEFT HAND For probing 10 micron geometries, 0.4” (10.0mm) maximum travel per axis, 32 TPI lead screw, mini-arc manipulator, standard vacuum base for use with PSI 400 and 410 stations. If you can not find what you need, Please contact us for more information.

P45探針座售價: (Call)

Wed, 30 Dec 2009 14:16:51 +0800

PRODUCT NAME: P45, LEFT HAND Left Hand Articulating Arm, 24 TPI (threads per inch), for probing non linear axis 5-10 micron geometries vacuum base