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四点探针阻值量测3
https://www.activelink.com.tw/ 科宇系统有限公司

4D 4PP RS Meter

欢迎洽询相关机型及规格!










FOUR DIMENSIONS INC. is located in California and has manufactured advanced semiconductor probing systems since 1978. We provide Four-Point Probes with an extended measurement range for sophisticated probing of compound semiconductor wafers. 


 280PI/280SI 4PP Station for 200mm or 156mm x 156mm Features

  • Semi-Auto Sheet Resistivity Meter
  • Measurement Range 1m W/sq to 800K W/sq
  • extended range up to 8E11 W/sq
  • temperature compensation option
  • up to to 8" wafer capability or 156mm x 156mm
  • stand alone systems and PC controlled systems with Automap software package

Model 233AC/ 233AS / 333AC / 333AF 4PP Station for 200mm/300mm Features:

  • Fully Automated Cassette to Cassette System with SMIF/FOUP option
  • Sheet Resistance Measurement Range 1m W/sq to 800K W/sq
  • extended range up to 8E11 W/sq
  • up to to 8"/12" wafer capability
  • Automap software package
  • SECS-II communication available
  • Automatic probe-head switching available

Jandel - Four-Point-Probe Heads

Jandel Engineering Ltd. 成立於1967(具备超过50年以上的专业经验), 是英国专门制造四点探针头的厂商各大厂牌阻值量测系统,例如: KLA-Tencor/PrometrixCDE ResMap4DNapson等,已广泛使用於国内代工、记忆体、封测及面板厂等客户,依据量测需求有多种规格可以选择,欢迎洽询。




















Cartridge probe with 6-way connector (KLA/Tencor)



Cartridge probe with 6-way connector (CDE) 

Cylindrical four point probe head



Micro Point Pro (MPP) - Four-Point-Probe Heads

Micro Point Pro (MPP)成立於 2010 年,收购了 Kulick & Sofa 四点探针头及后端工具生产线,同时一并吸收了该生产线拥有超过 40 年专业知识和经验丰富的员工。4PP探头全在以色列制造、组装、并通过内部严谨的品质检验。其4PP探头OEM客户有:KLA-Tencor、Napson 、Kokusai, etc,尚有各式四点探针针头可供选购或客制。





MPP is a world renowned, leading manufacturer of Four Point Probe (4PP) heads for 
resistivity measurements of wafers and thin conductive films.

MPP’s 4PP are commonly used in applications such as:
▪ Resistivity measurement of silicon wafers
▪ 4-point measurement of epitaxial, ion-implanted and defused layers
▪ 4-point measurement of metallic and other thin films

 MPP’s Probe Head Features and Advantages:
 ▪ Tungsten Carbide needles with low friction Ruby guides
 ▪ A wide range of probe tip radii and needle spacings
 ▪ Individual needle pressure adjustment
 ▪ Variety of probe head designs : Fell, Cylindrical, others..
 ▪ Option for customization
 ▪ Refurbishment program available

MPP’s probe heads are being used across the globe on the most well-known wafer resistivity measuring equipment such as KLA, Kokusai, Napson and other systems.