科宇系統有限公司

NTM eTa - In-Situ Wafer Temperature Monitor

Thu, 28 Jul 2016 15:52:33 +0800

利用紅外光感測溫度的方式，即時並且在原點位上測量晶圓 (Wafer) 表面溫度 (Temperature) ，耗能低、更新速率快 (up to 3000Hz)，並且採用可拆卸式的光纖。此外，機台針對波長的精確性、更新的速率和背景過濾都有補償的功能。

4D Mercury CV Application Chart

Tue, 08 Sep 2009 18:50:10 +0800

Mercury Probe C-V map Systems:Measurement techniques Capacitance-Voltage (CV):Cd (square wave deep pulse)Cq (square wave quasi static)Ch (square wave high frequency)Sinusoidal Ch (Agilent 4192A, 4285 A, Keithley 590) Current VoltageCurrent range 10fA to 1mA, Voltage range up to +/-100VExtended Voltage range +/- 1000V (Keithley 2410, 237)Constant currentConstant voltageMulti-terminal IV curves (pseudo MOST technique) Silicon Oxide And Gate Material, Characterization And Integrity Monitoring:Cox (Oxide capacitance)tox (Oxide thickness)K value (dielectric constant)K-f (frequency dependent dielectric constant)teq (equivalent oxide thickness)Vfb (flat band voltage)Dit (Interface trap density)(Sheet) Resistance and Resistivity measurement of SiO2 and semi-insulating materialsTDDB (Time dependent dielectric breakdown) tests:tbd (time to breakdown)Qbd (Charge to Breakdown)Vbd (ramp breakdown Voltage)Defect density (Density of defect causing early breakdown, e.g. Pinhole density)Cumulative Compound SemiconductorsN(W) Carrier density profilingResistivity of semi-insulating substrates or layersPinch-off Voltage High Resistivity MaterialsI-V (Current vs. Voltage)(Sheet) Resistance and Resistivity measurement Ferroelectric materialsK-E (dielectric vs. electric field)P-E (polarization vs. electric field)K-f (dielectric vs. frequency) with Model 192 probe stationK-T (dielectric vs. temperature) with temperature chamber for Tc (Curie temperature)Hysteresis loop

4D 4PP RS Meter

Wed, 30 Jun 2010 13:05:55 +0800

歡迎洽詢相關機型及規格!FOUR DIMENSIONS INC. is located in California and has manufactured advanced semiconductor probing systems since 1978. We provide Four-Point Probes with an extended measurement range for sophisticated probing of compound semiconductor wafers. 280PI/280SI 4PP Station for 200mm or 156mm x 156mm FeaturesSemi-Auto Sheet Resistivity MeterMeasurement Range 1m W/sq to 800K W/sqextended range up to 8E11 W/sqtemperature compensation optionup to to 8" wafer capability or 156mm x 156mmstand alone systems and PC controlled systems with Automap software packageModel 233AC/ 233AS / 333AC / 333AF 4PP Station for 200mm/300mm Features:Fully Automated Cassette to Cassette System with SMIF/FOUP optionSheet Resistance Measurement Range 1m W/sq to 800K W/sqextended range up to 8E11 W/squp to to 8"/12" wafer capabilityAutomap software packageSECS-II communication availableAutomatic probe-head switching available

Wet Series - Wet Chemistry Process monitoring systems

Thu, 28 Jul 2016 13:53:03 +0800

Wet series enable stringent and instant process control which identifies excursions before affecting yields.*Montoring in-line and on-time*No sampling or dilution required*Operating in low costs*Enable closed loop control*Temperature compensation *Self-calibration 可測量的液體種類繁多，請來信或來電詢問。

PSI 442-PMI ™ MANUAL PHOTOMASK INSPECTION

Wed, 30 Jun 2010 13:10:17 +0800

PSI462PMI手動光罩檢驗機適用4~9吋光罩檢查，搭配USMCO專用400X光學顯微鏡迅速檢測各種光罩缺陷，並可加裝CCD攝影機與高解析度顯示螢幕，是最經濟超值的光罩檢驗機。

PSI 400/ 410 Quick Position Manual Probe Station

Thu, 23 Dec 2010 11:52:01 +0800

PSI 400/ 410 Quick Position Manual Wafer Probe Station 量測6”~8”晶圓，高精確度，推拉式容易操作，可使用單手操作定位。PSI 400平台Z軸具有3個定位點， PSI 410 顯微鏡Z軸具有12個定位點。

NTM DeLTA - In-Situ Wafer Temperature Monitor

Thu, 28 Jul 2016 15:51:54 +0800

利用紅外光感測溫度的方式，即時並且在原點位上同時測量晶圓 (Wafer) 表面溫度 (Temperature) 和輻射的反射率 (Emissivity reflectivity)，耗能低、更新速率快 (up to 3000Hz)，並且採用可拆卸式的光纖。此外，機台針對波長的精確性、更新的速率和背景過濾都有補償的功能。

CVmap 92A/B

Tue, 08 Sep 2009 18:50:55 +0800

Mercury Probe Systems CVMAP 92 A/B Desktop system Unique Mercury probe: Dot area 5E-5 to 0.6 cm2Contact area repeatability better 2%Contact configurations: Dot, Dot / Ring, Dot / 2 RingsRefreshed mercury before each contact insures clean contactProbe head easy to changeIntegrated light source for illumination of measured sample (probe head dependent)Minimal probe head to wafer contact areaNon scratching poly-carbonate probe head materialCapacitance test: Quasistatic method with square wave signals (internal)High frequency method with square wave signals (internal)Deep pulsed method with square wave signals (internal)Test frequency up to 10kHz (Bandwidth 1 MHz)External C-V meters (Bandwidth:1MHz standard, up to 10MHz optional)Capacitance measurement range: 0 to 20 nFStray capacitance < 1.5pF (desktop systems)Equivalent oxide thickness by C-V: 1 nm to 2000 nm, repeatability

WetCon - Conductive Concentration Analyser

Thu, 28 Jul 2016 10:51:34 +0800

用導電度測量可導電的化學溶液（單一成份Single Component）濃度，有自動校正和溫度補償的功能，可測量DHF、HCl、HNO3、H2SO4、NH3、TMAH、Citric Acid……等液體。

PSI 462-PMI™ PHOTOMASK INSPECTION

Tue, 08 Sep 2009 18:56:45 +0800

PSI462PMI手動光罩檢驗機適用4~9吋光罩檢查，搭配USMCO專用400X光學顯微鏡迅速檢測各種光罩缺陷，並可加裝CCD攝影機與高解析度顯示螢幕。 PSI 462 PMI手動光罩檢驗機提供DRO (Digital Readout)數位座標判讀系統，可重複進行缺陷定位與檢驗，是量測與故障分析的最佳利器。

PSI 2020HV™ 電路板訊號完整性測試探針台

Wed, 30 Dec 2009 14:39:30 +0800

PSI 2020HV™ HORIZONTAL/VIRTICAL SIGNAL INTEGRITY TDR PROBE STATION MULTIPLE CIRCUIT BOARD CONFIGURATIONS 適用高速印刷電路板進行電性量測或時域測試(Time Domain Testing)。量測平台可調整為水平或垂直位置，可搭配兩具攝影機。顯微鏡放大倍率為2.1X to 270X。 PSI 2020HV可與Tektronix 11800、SDZOTDR、TDS 8000、80E04TD及Agilent 54750 or 83480相容。如需其他規格請聯絡本公司

Jandel - Four-Point-Probe Heads

Tue, 02 Aug 2016 09:23:16 +0800

Jandel Engineering Ltd. 成立於1967年(具備超過50年以上的專業經驗), 是英國專門製造四點探針頭的廠商，各大廠牌阻值量測系統，例如: KLA-Tencor/Prometrix、CDE ResMap、4D、Napson等，已廣泛使用於國內代工、記憶體、封測及面板廠等客戶，依據量測需求有多種規格可以選擇，歡迎洽詢。Cartridge probe with 6-way connector (KLA/Tencor)Cartridge probe with 6-way connector (CDE) Cylindrical four point probe head

Manipulators探針座

Fri, 27 Dec 2024 11:19:10 +0800

PRODUCT NAME: P210/360VM, LEFT HAND For probing 10 micron geometries, 0.4” (10.0mm) maximum travel per axis, 32 TPI lead screw, mini-arc manipulator, standard vacuum base for use with PSI 400 and 410 stations. If you can not find what you need, Please contact us for more information.

CVmap 3093AC/BC

Tue, 08 Sep 2009 18:50:35 +0800

CVmap 3093 AC/BC Features: Cassette to cassette version of CVmap 3093 A/B150mm, 200 mm, and 300 mm (6", 8", and 12") capabilitySafety first design principleUnique Mercury probe: Dot area 5E-5 to 0.6 cm2Contact area repeatability better 2%Contact configurations: Dot, Dot / Ring, Dot / 2 RingsRefreshed mercury before each contact insures clean contactProbe head easy to changeIntegrated light source for illumination of measured sample (probe head dependent)Minimal probe head to wafer contact areaNon scratching poly-carbonate probe head material Capacitance test: Quasistatic method with square wave signals (internal)High frequency method with square wave signals (internal)Deep pulsed method with square wave signals (internal)Test frequency up to 10kHz (Bandwidth 1 MHz)External C-V meters (Bandwidth:1MHz standard, up to 10MHz optional)Capacitance measurement range: 0 to 20 nFStray capacitance < 1.5pF (desktop systems)Equivalent oxide thickness by C-V: 1 nm to 2000 nm, repeatability

WetRad - Mixing Component Concentration Analyser

Thu, 28 Jul 2016 17:39:34 +0800

從UV/VIS/NIR裡選定兩個波長，測量混合液（mixing chemicals）的其中一個成份（One chose Component），可測量0˚C到120˚C的化學溶液，採用光學式測量，快速、連續且準確的判讀欲知成分濃度，WetRad裡有兩顆LED燈泡可以互相校正光源，可量測H2O in IPA、H2O in solvent、TMAH、H2O2等等。

Photomask Visual Inspection/Review Station

Tue, 08 Sep 2009 18:56:23 +0800

Photomask Visual Inspection/Review Station PSI生產之光罩檢驗機提供客戶最完善且更具經濟效益的解決方案，讓客戶能偵測、檢驗各種先進光罩上的缺陷，改進生產與品管的效率。具備精確定位能力與先進光學照明，透過四種獨立光源 Incident Bright-Field(IBF) 、 Incident Dark-Field(IDF) 、 Transmitted Bright-Field(TBF)、 Transmitted Dark-Field(TDF)組成八種照明模式，能準確檢測包括particles、pinhole、chrome defect、edge effect、scratching thin metal and contamination等各種光罩的缺陷位置，大幅提高光罩檢驗效率與正確性。PSI 400 系列適用於 4"~9" 光罩；PSI 300 系列適用於 4"~7" 光罩；342-PMI 為通用手動光罩檢驗機；362-PMI 提供DRO( Digital Readout)數位座標判讀系統；

Micro Point Pro (MPP) - Four-Point-Probe Heads

Fri, 27 Dec 2024 09:38:32 +0800

Micro Point Pro (MPP)成立於 2010 年，收購了 Kulick & Sofa 四點探針頭及後端工具生產線，同時一併吸收了該生產線擁有超過 40 年專業知識和經驗豐富的員工。4PP探頭全在以色列製造、組裝、並通過內部嚴謹的品質檢驗。其4PP探頭OEM客戶有：KLA-Tencor、Napson 、Kokusai, etc，尚有各式四點探針針頭可供選購或客製。MPP is a world renowned, leading manufacturer of Four Point Probe (4PP) heads for resistivity measurements of wafers and thin conductive films.MPP’s 4PP are commonly used in applications such as:▪ Resistivity measurement of silicon wafers▪ 4-point measurement of epitaxial, ion-implanted and defused layers▪ 4-point measurement of metallic and other thin films MPP’s Probe Head Features and Advantages: ▪ Tungsten Carbide needles with low friction Ruby guides ▪ A wide range of probe tip radii and needle spacings ▪ Individual needle pressure adjustment ▪ Variety of probe head designs : Fell, Cylindrical, others.. ▪ Option for customization ▪ Refurbishment program availableMPP’s probe heads are being used across the globe on the most well-known wafer resistivity measuring equipment such as KLA, Kokusai, Napson and other systems.

WetSpec 201/200 - Mixing Chemical Concentration Analyser

Thu, 28 Jul 2016 14:37:47 +0800

以近紅外線技術量測Mixing Chemical裡面所有成分的個別濃度值，可測量0˚C到120˚C的化學溶液。WetSpec201用來測量單個化學槽，WetSpec200則可以外接八個化學槽，依化學槽的順序測量不同化學溶液。WetSpec可以測量的化學液體種類十分多，例如SC1、SC2、SPM、DSP、BOE、solvent、HF/HCl、Al etching、IPA/KOH等等液體，歡迎來信或來電洽詢。

Probe tips探針

Tue, 08 Sep 2009 18:59:12 +0800

Straight TipsCat whisker TipsBend Tips Double bend TipsSpring probe TipsRF/Microwave Tips Tungsten Tip sizes between 0.1um to 10um.Plated Gold or special metals Special materials (beryllium cooper, nickel, etc.) available.